The flows generated in many modern micro-devices possess very little convective inertia, however, they can be highly unsteady and exert substantial hydrodynamic forces on the device components. Typically these components exhibit some degree of compliance, which traditionally has been treated using simple one-dimensional elastic beam models. However, recent findings have suggested that three-dimensional effects can be important and, accordingly, we consider the elastohydrodynamic response of a rapidly oscillating three-dimensional elastic plate that is immersed in a viscous fluid. In addition, a preliminary model will be presented which incorporates the presence of a nearby elastic wall.